A comparative study of integrated ferroelectric polymer pyroelectric sensors
(1998)
Journal Article
Setiadi, D., Binnie, D., Armitage, A., Benjamin, K., & Weller, H. (1998). A comparative study of integrated ferroelectric polymer pyroelectric sensors. Integrated Ferroelectrics, 19(1-4), 33-47. https://doi.org/10.1080/10584589808012694
This paper presents a comparative study of integrated pyroelectric sensors based on ferroelectric polymers. Two deposition technologies of PVDF and VDF/TrFE copolymer, both compatible with IC manufacturing, are presented. A 9 μm PVDF film is bonded o... Read More about A comparative study of integrated ferroelectric polymer pyroelectric sensors.