A comparative study of integrated ferroelectric polymer pyroelectric sensors

Setiadi, D; Binnie, David; Armitage, Alistair; Benjamin, Kenneth; Weller, H

Abstract

This paper presents a comparative study of integrated pyroelectric sensors based on ferroelectric polymers. Two deposition technologies of PVDF and VDF/TrFE copolymer, both compatible with IC manufacturing, are presented. A 9 μm PVDF film is bonded on a silicon substrate using a capacitive acrylic thin film and a i μm VDF/TrFE copolymer is coated directly using a spin-coating technique. The theoretical response of both PVDF and VDF/TrFE pyroelectric sensors are calculated and related to the measured values. Peak responsivities of 4.5 V/W at 200 Hz and 3 V/W at 1kHz have been achieved for the pyroelectric sensors based on PVDF AND VDF/TrFE copolymer, respectively. Despite the responsivity of PVDF being slightly higher than that of the VDF/TrFE copolymer, the choice of which polymer to use will depend on the application and the preferred processing route

Citation

Setiadi, D., Binnie, D., Armitage, A., Benjamin, K., & Weller, H. (1998). A comparative study of integrated ferroelectric polymer pyroelectric sensors. Integrated Ferroelectrics, 19(1-4), 33-47. https://doi.org/10.1080/10584589808012694

• Journal Article Type: Article
• Publication Date: 1998-04
• Deposit Date: Jul 29, 2010
• Journal: Integrated Ferroelectrics
• Print ISSN: 1058-4587
• Electronic ISSN: 1607-8489
• Publisher: Taylor & Francis
• Peer Reviewed: Peer Reviewed
• Volume: 19
• Issue: 1-4
• Pages: 33-47
• DOI: https://doi.org/10.1080/10584589808012694
• Keywords: Pyroelectric sensor; PVDF; VDF/TrFE copolymer
• Public URL: http://researchrepository.napier.ac.uk/id/eprint/3216
• Publisher URL: http://dx.doi.org/10.1080/10584589808012694