D Setiadi
A comparative study of integrated ferroelectric polymer pyroelectric sensors
Setiadi, D; Binnie, David; Armitage, Alistair; Benjamin, Kenneth; Weller, H
Authors
David Binnie
Alistair Armitage
Kenneth Benjamin
H Weller
Abstract
This paper presents a comparative study of integrated pyroelectric sensors based on ferroelectric polymers. Two deposition technologies of PVDF and VDF/TrFE copolymer, both compatible with IC manufacturing, are presented. A 9 μm PVDF film is bonded on a silicon substrate using a capacitive acrylic thin film and a i μm VDF/TrFE copolymer is coated directly using a spin-coating technique. The theoretical response of both PVDF and VDF/TrFE pyroelectric sensors are calculated and related to the measured values. Peak responsivities of 4.5 V/W at 200 Hz and 3 V/W at 1kHz have been achieved for the pyroelectric sensors based on PVDF AND VDF/TrFE copolymer, respectively. Despite the responsivity of PVDF being slightly higher than that of the VDF/TrFE copolymer, the choice of which polymer to use will depend on the application and the preferred processing route
Citation
Setiadi, D., Binnie, D., Armitage, A., Benjamin, K., & Weller, H. (1998). A comparative study of integrated ferroelectric polymer pyroelectric sensors. Integrated Ferroelectrics, 19(1-4), 33-47. https://doi.org/10.1080/10584589808012694
| Journal Article Type | Article |
|---|---|
| Publication Date | 1998-04 |
| Deposit Date | Jul 29, 2010 |
| Journal | Integrated Ferroelectrics |
| Print ISSN | 1058-4587 |
| Electronic ISSN | 1607-8489 |
| Publisher | Taylor & Francis |
| Peer Reviewed | Peer Reviewed |
| Volume | 19 |
| Issue | 1-4 |
| Pages | 33-47 |
| DOI | https://doi.org/10.1080/10584589808012694 |
| Keywords | Pyroelectric sensor; PVDF; VDF/TrFE copolymer; |
| Public URL | http://researchrepository.napier.ac.uk/id/eprint/3216 |
| Publisher URL | http://dx.doi.org/10.1080/10584589808012694 |