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High-Performance 50μm Silicon-Based On-Chip Antenna with High Port-To-Port Isolation Implemented by Metamaterial and SIW Concepts for THz Integrated Systems

Alibakhshikenari, Mohammad; Virdee, Bal S.; See, Chan; Abd-Alhameed, Raed; Falcone, Francisco; Limiti, Ernesto


Mohammad Alibakhshikenari

Bal S. Virdee

Raed Abd-Alhameed

Francisco Falcone

Ernesto Limiti


A novel 50μm Silicon-based on-chip antenna is presented that combines metamaterial (MTM) and substrate integrated waveguide (SIW) technologies for integration in THz circuits operating from 0.28 to 0.30 THz. The antenna structure comprises a square patch antenna implemented on a Silicon substrate with a ground-plane. Embedded diagonally in the patch are two T-shaped slots and the edges of the patch is short-circuited to the ground-plane with metal vias, which convert the structure into a substrate integrated waveguide. This structure reduces loss resulting from surface waves and Silicon dielectric substrate. The modes in the structure can be excited through two coaxial ports connected to the patch from the underside of the Silicon substrate. The proposed antenna structure is essentially transformed to exhibit metamaterial properties by realizing two T-shaped slots, which enlarges the effective aperture area of the miniature antenna and significantly enhances its impedance bandwidth and radiation characteristics between 0.28 THz to 0.3 THz. It has an average gain and efficiency of 4.5dBi and 65%, respectively. In addition, it is a self-isolated structure with high isolation of better than 30dB between the two ports. The on-chip antenna has dimensions of 800×800×60 μm³.

Presentation Conference Type Conference Paper (Published)
Conference Name 13th International Congress on Artificial Materials for Novel Wave Phenomena – Metamaterials
Start Date Sep 16, 2019
End Date Sep 21, 2019
Acceptance Date Jun 7, 2019
Online Publication Date Nov 14, 2019
Publication Date Nov 18, 2019
Deposit Date Nov 21, 2019
Publisher Institute of Electrical and Electronics Engineers
Book Title 2019 Thirteenth International Congress on Artificial Materials for Novel Wave Phenomena (Metamaterials)
Keywords Silicon-Based On-Chip Antenna; metamaterial (MTM); substrate integrated waveguide (SIW)
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