Skip to main content

Research Repository

Advanced Search

Ultrathin Ion-Sensitive Field-Effect Transistor Chips with Bending-Induced Performance Enhancement

Vilouras, Anastasios; Christou, Adamos; Manjakkal, Libu; Dahiya, Ravinder


Anastasios Vilouras

Adamos Christou

Ravinder Dahiya


Flexible multifunctional sensors on skin or wearables are considered highly suitable for next-generation noninvasive health care devices. In this regard, the field-effect transistor (FET)-based chemical sensors such as ion-sensitive FETs (ISFETs) are attractive as, with the ultrathin complementary metal oxide semiconductor technology, they can enable a flexible or bendable sensor system. However, the bending-related stress or strain could change the output of devices on ultrathin chips (UTCs), and this has been argued as a major challenge hindering the advancement and use of this technology in applications such as wearables. This may not be always true, as with drift-free ISFETs, we show that bending could also enhance the performance of UTCs. Through fine control of bending radius in the micrometer scale, the mechanically flexible RuO2-based ISFETs on UTCs (44.76 μm thickness) are shown to reproducibly enhance the performance even after 1000 bending cycles. The 1.3 orders of magnitude improved stability (the drift rate changed from −557 nA/min to −28 ± 0.16 nA/min) is observed over a time period of 417.3 s (∼7 min) at fixed biasing and temperature conditions and under different pH conditions. Finally, a compact macromodel is developed to capture the bending-induced improvements in flexible ISFETs. The performance enhancement by controlled bending of devices could generally benefit the rapidly growing field of flexible electronics.

Journal Article Type Article
Acceptance Date Jul 12, 2020
Online Publication Date Jul 13, 2020
Publication Date Aug 25, 2020
Deposit Date Jul 19, 2022
Publicly Available Date Jul 20, 2022
Journal ACS Applied Electronic Materials
Print ISSN 2637-6113
Electronic ISSN 2637-6113
Publisher American Chemical Society
Peer Reviewed Peer Reviewed
Volume 2
Issue 8
Pages 2601-2610
Keywords ISFET, ultrathin chips, flexible electronics, CMOS, drift compensation
Public URL


You might also like

Downloadable Citations